Auger electronic energy spectrum was applied in the paper to analyze the metallic film surface of growing interface of diamond monocrystal and fine Auger spectrum of adjacent carbon atom, as well as Auger spectrum structure of the surroundings and surface of diamond monocrystal. 用Auger电子能谱技术分别进行金刚石单晶生长界面的金属膜表面及附近碳原子的精细Auger谱分析、金刚石单晶附近及其表面的Auger谱精细结构分析。